Product overview

Our 3D Optical Profiler combined with high-precision scanning and high-precision algorithms can achieve surface topography analysis from nanometer to millimeter scale, including roughness, steps, surface profile, curvature and other parameters. It has been widely used in semiconductors, optical materials, biochips, metal surfaces, precision machining and other industries because of its non-contact ( non-destructive testing ), no requirement for sample surface rigidity, high precision and fast scanning.

Advantage

Four different measurement modes-brightfield observation, white light interferometry, confocal microscopy, and depth of field fusion-are integrated into a single microscope to meet measurement needs in various scenarios.

Analysis results can be achieved with sub-nanometer to nanometer precision in different measurement modes.

The unique AI algorithm analyzes the pattern to achieve ' no delay ' result output and experience ' One-Click ' result measurement.

We provide "modular" customized functional products to meet the workflow tasks of various specific scenarios whether it's special sample requirements or functional needs.

Features a revolutionary integrated design that combines the optical system and sensors into a single housing. This compact design not only improves user-friendliness but also greatly increases system stability, ensuring dependable performance under all operating conditions.

Application

This 3D Optical Profiler, with its excellent optical detection technology, meets the stringent requirements of different industries and application scenarios. Whether it 's biochip, semiconductor, optical material detection, we offer customized observation and measurement solutions to suit your specific needs.This series not only features advanced 3D imaging technology but also incorporates multiple innovative features, providing users a comprehensive observation experience.

Parameters

Measurement Types	White light interference / Depth of field fusion / Confocal
Observation Types	Images (2D/3D), Morphology, Dimensions, Roughness, Thickness, etc.
Light Source	White Light LED, Spectral Range: 420-700 nm
Nosepiece	6-Position @ fully motorized; Repeat Positioning Accuracy: 0.001°
Camera	1936 × 1464 (132.2 fps)
Z Stage Travel / Scanning range	Moving distance: 100 mm; Scanning range: 10 mm
Roughness RMS Repeatability	0.008 nm
Step Repeatability	0.1 % (10 μm)
XY Stage Range	100 mm × 100 mm @ fully motorized
Tip-tilt Stage	±3° pitch adjustment @ fully motorized
Weight	75 kg
Dimensions	516 mm × 430 mm × 550 mm
Environmental Requirements	Recommended ambient temperature 23℃, humidity20% - 50%

Certification

Our company's optical equipment (including optical processing equipment and optical inspection equipment) has successfully obtained ISO certification.