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Nice-tech is a professional semiconductor equipment provider with a dedicated factory and an experienced technical team. Our operations are supported by multiple production lines equipped with standardized process control and key semiconductor-related equipment to ensure stable quality and delivery. The company is backed by a skilled team of engineers, technicians, and project specialists with solid industry experience, enabling effective coordination between equipment suppliers and end users.
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Tailored Solution Delivery
Our experienced team analyzes clients' specific needs to match the most suitable semiconductor equipment and offer customized solutions for different production and R&D scenarios.
Comprehensive Technical Support
We provide full-cycle technical assistance, from equipment commissioning to maintenance, including on-site troubleshooting and real-time online consultation, reducing operational hassles.
Support for Advanced Processes
We continuously invest in industry insights and adapt to cutting-edge tech trends, offering high-precision equipment solutions and upgrading services to meet high-end chip production needs.
Service Advantages
Offer 1v1 online support for equipment operation, parameter adjustment, and process optimization, responding to your questions promptly.
A 3D optical profilometer is a non-contact, non-destructive metrology system based on optical microscopy that is specifically designed for surface texture and roughness metrology in R&D and manufacturing environments. They collect data areally (over a 2D area) with a single exposure and use that data to generate 3D height maps.
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Measurement Types |
White light interference / Depth of field fusion / Confocal |
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Observation Types |
Images (2D/3D), Morphology, Dimensions, Roughness, Thickness, etc. |
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Light Source |
White Light LED, Spectral Range: 420-700 nm |
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Nosepiece |
6-Position @ fully motorized; Repeat Positioning Accuracy: 0.001° |
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Camera |
1936 × 1464 (132.2 fps) |
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Z Stage Travel / Scanning range |
Moving distance: 100 mm; Scanning range: 10 mm |
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Roughness RMS Repeatability |
0.008 nm |
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Step Repeatability |
0.1 % (10 μm) |
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XY Stage Range |
100 mm × 100 mm @ fully motorized |
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Tip-tilt Stage |
±3° pitch adjustment @ fully motorized |
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Weight |
75 kg |
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Dimensions |
516 mm × 430 mm × 550 mm |
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Environmental Requirements |
Recommended ambient temperature 23℃, humidity20% - 50% |
Key Features of 3D Optical Profiler
High Resolution
These instruments offer exceptional resolution, capable of measuring surface features on the nanometre to millimetre scale. The level of detail they provide is essential for industries that require stringent surface specifications, such as semiconductor wafer inspection or medical implant manufacturing.
Multi-Mode Optics
Many 3D optical profilers come with multi-mode optical systems, enabling the combination of different measurement techniques within a single instrument. This versatility allows users to switch between modes depending on the application, whether it’s analysing smooth, reflective surfaces or rough, uneven textures.
True Colour Imaging
Some models also incorporate true colour imaging alongside 3D measurement, providing high-resolution colour maps of the surface. This feature is particularly beneficial for detecting surface defects or variations in material composition that may not be apparent in a standard 3D scan.
Applications of 3D Optical Profiler
Step Height Measurement
Accurate step height measurement is critical in semiconductor fabrication and microelectronics. 3D optical profilers can precisely measure changes in height at the nanometre scale, ensuring that even the smallest deviations from design specifications are detected.
Film Thickness Analysis
In industries like optics and solar energy, where film thickness plays a significant role in product performance, 3D optical profilers offer a non-destructive method to measure transparent films on substrates, ensuring uniformity and quality control.
Surface Roughness and Waviness Characterisation
Manufacturers frequently use 3D optical profilers to quantify surface roughness and waviness, parameters that directly affect product functionality, especially in high-precision components such as lenses or medical devices. These tools provide quick and accurate measurements of surface texture, facilitating better control over production processes.
Form and Defect Measurement
In addition to roughness, 3D optical profilers can assess the overall form of a surface, identifying deviations such as bowing or warping. They are also employed in defect inspection, where automated optical systems quickly scan for imperfections like scratches or contamination that could impact product performance.
Solar Cell Metrology
The use of 3D optical profilers in solar cell metrology has gained traction as they help in analysing surface features, including texture and metallisation patterns, which are critical to improving energy efficiency in solar panels.
How It Works 3D Optical Profiler
Surface Preparation: The object to be measured is cleaned and positioned within the device. Proper alignment ensures accurate data capture.
Illumination and Scanning: The system projects light—such as laser beams or structured light—onto the surface. The light interacts with surface features, creating patterns or reflections captured by sensors.
Data Acquisition: High-resolution cameras or sensors record the reflected light patterns. Multiple scans from different angles may be performed to ensure comprehensive coverage.
Data Processing: Specialized software reconstructs the captured data into a 3D model. This step involves filtering noise, aligning scans, and generating detailed surface maps.
Analysis and Reporting: The software analyzes surface features, measuring parameters like roughness, step heights, or waviness. Results are visualized and exported for further review.
Quality Control or Further Use: The detailed surface data supports quality assurance, defect detection, or product development, depending on the application.
Choosing the Right 3D Optical ProfilerWhen selecting an optical
Measurement Range and Resolution
When it comes to surface measurement, not all applications are the same. Ultra-smooth or nanometer-scale surfaces call for sub-nanometer vertical resolution, while roughness analysis of machined parts often requires a wider measurement range to capture sharp peaks and valleys.
Sample Type and Material Sensitivity
Not all samples respond the same way to optical measurement. Highly reflective surfaces (like metals or mirrors), transparent materials (like glass or polymers), and soft or viscous samples all present unique challenges.
Surface Geometry (Flat, Curved, Rough)
Surface shape has a big impact on measurement. Flat or mildly curved surfaces are relatively straightforward, but highly curved or complex geometries — such as lenses, stents, or turbine blades — may require specialized objective lenses, stitching capability, or multi-angle scanning.
Analysis Software and Data Visualization Tools
Hardware is only half the equation. A powerful software package is essential for turning raw data into meaningful insights. Look for tools that can automatically calculate roughness parameters, correct for surface shape, generate 3D maps, perform step height analysis, and export data in formats compatible with your reporting or quality systems.
Budget and Throughput Requirements
Finally, balance performance with practicality. High-end research systems offer unmatched precision but may be overkill for routine production checks.
Measurement Techniques of 3D Optical Profiler
White Light Interferometry (WLI)
White light interferometry (WLI) is one of the most commonly used techniques in 3D optical profilers. It offers high vertical resolution and is suitable for wide-area measurements. This method works by analysing the interference pattern created by light reflected from the sample surface, allowing it to capture even the smallest height variations.
Phase-Shifting Interferometry (PSI)
Phase-shifting interferometry (PSI) excels in measuring extremely smooth surfaces. By shifting the phase of light waves and analysing the resulting interference patterns, PSI can detect sub-nanometre variations in surface height, making it ideal for applications like optical component manufacturing.
Shearing Interferometry
For high-resolution surface measurement, shearing interferometry is another powerful technique. It captures subtle changes in surface topography, providing detailed 3D images of small surface features, which is crucial for industries like microelectronics.
ZDot Technology
A proprietary technology known as ZDot enables simultaneous collection of 3D topography data and true colour images. This dual functionality helps users inspect surface features more comprehensively, analysing both structural and visual characteristics at once.
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