Your Professional Spin Rinse Dryer Supplier
Nice-tech is a professional semiconductor equipment provider with a dedicated factory and an experienced technical team. Our operations are supported by multiple production lines equipped with standardized process control and key semiconductor-related equipment to ensure stable quality and delivery. The company is backed by a skilled team of engineers, technicians, and project specialists with solid industry experience, enabling effective coordination between equipment suppliers and end users.
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![Horizontal Wafer Dryer]()
Horizontal Wafer DryerThe Horizontal Wafer Dryer is a fully automatic in-line bench laminar flow dryer — tailor-made for semiconductor manufacturing! It packs intelligent control, stable operation, and high-precision drying all in one. Designed to pair with...view more -
![Vertical Wafer Dryer]()
Vertical Wafer DryerThe Vertical Wafer Dryer —this one’s built with precision in mind, tailored specifically for the strict demands of those industries.view more
why choose us
Tailored Solution Delivery
Our experienced team analyzes clients' specific needs to match the most suitable semiconductor equipment and offer customized solutions for different production and R&D scenarios.
Comprehensive Technical Support
We provide full-cycle technical assistance, from equipment commissioning to maintenance, including on-site troubleshooting and real-time online consultation, reducing operational hassles.
Support for Advanced Processes
We continuously invest in industry insights and adapt to cutting-edge tech trends, offering high-precision equipment solutions and upgrading services to meet high-end chip production needs.
Service Advantages
Offer 1v1 online support for equipment operation, parameter adjustment, and process optimization, responding to your questions promptly.
A Vertical Wafer Dryer is a specialized industrial equipment designed to efficiently remove moisture from various materials using heat and airflow. Unlike horizontal dryers or rotary drum dryers, vertical dryers utilize a compact, upright design that saves floor space and enables effective heat transfer through conduction, convection, or a combination of both. These machines are widely used in chemical, pharmaceutical, food processing, and mineral industries due to their efficiency, consistent drying performance, and scalability.
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Category |
Item |
Specification Details |
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Basic Information |
Product Name |
Vertical double chamber dryer |
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Model Number |
Semiclean-QX-61-2M-A |
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Size (Reference) |
L×D×H = Surface width 490mm × Depth 937mm × Height 1880mm |
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Weight (Approx) |
260kg |
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Process Cavity & Cassette |
Process Cavity |
Double cavity (upper & lower), independently controllable; can place 6" customized carrier rotor |
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Cassette Type Used |
KM-40N (100 mm), A182-60MB (150 mm) |
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Cleaning & Drying Parts Specs |
Equipped with 2pcs 4" custom rotors; cassette supplied by customer, rotor parts are final design samples |
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Operational Parameters |
Process Time Setting |
1s - 900s; maintenance accuracy ≤ ±5% |
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Working Speed |
100-2500rpm/min (adjustable per product characteristics and process); speed error < ±2% |
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Chamber Drying Temperature Range |
Minimum: ≥45°C; Maximum: ≤85°C |
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Dry Cleanliness Requirement |
Particles ≥0.3μm < 30 grains/wafer |
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Equipment UPTIME |
≥95%; average monthly trouble-free working time ≥648H |
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Operation Fragmentation Rate |
≤1/10000 |
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Media Requirements |
Deionized Water |
Pressure range: 0.2~0.4Mpa; maximum flow: 0.7m³/h |
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Nitrogen |
Pressure range: 0.5~0.6Mpa; maximum consumption: 18-20m³/h; used for heating and sealing |
Advantages of Vertical Wafer Dryer
High-Efficiency Drying
The vertical dryer reduces the pressure in the chamber to the saturated vapor pressure through vacuum technology, significantly lowering the boiling point of water (e.g., from 100°C at atmospheric pressure to 30-40°C in a vacuum environment). Simultaneously, it utilizes the low surface tension characteristics of isopropanol (IPA) to create a surface tension gradient that drives water flow back.
Reduced Damage
Traditional rotary drying, due to high-speed rotation (typically 1000-3000 rpm), easily generates electrostatic attraction of dust particles, and balance issues may lead to wafer breakage (breakage rate approximately 0.5%-1%). The vertical dryer eliminates static electricity through a vacuum environment and uses low-speed rotation (<1000 rpm) or static drying methods, reducing the breakage rate to below 0.01%.
Flexible Adaptation
The equipment uses 3-7 layers of interchangeable drying modules, with adjustable module spacing (20-200mm), supporting the construction of production lines with an annual output of 50,000 to 500,000 tons. The vertical dryer is not only suitable for wafer process drying but can also be integrated into wet cleaning equipment to achieve fully automated "dry-in, dry-out" processes.
Environmentally Friendly and Energy Efficient
The equipment uses reverse waste heat recovery technology, increasing the feed temperature to above 60°C and reducing overall energy consumption by 25%. Through the vacuum environment and the Marangoni effect, the vertical dryer reduces IPA consumption to 50-100 mL/batch and eliminates the need for heating, thus eliminating flammable risks.
Type of Vertical Wafer Dryer
Vertical Paddle Dryer
Utilizes indirectly heated paddles mounted on a central shaft to transfer heat via conduction while promoting continuous mixing of the material.
Vertical Airflow Dryer
Relies on high-velocity hot air blown upward through a bed of material, enabling rapid convective drying in thin layers.
Vertical Flash Dryer
Employs a high-speed stream of hot gas to dry fine particles almost instantly by direct contact, combining drying with particle separation.
Vertical Spray Dryer
Atomizes liquid feed into fine droplets that are rapidly dried by hot air in a vertical chamber, producing uniform powder particles.
Agricultural Sector:
Ideal for drying grains (wheat, corn, rice), legumes (beans, lentils), seeds, and other harvested crops without damaging their structure or nutritional value.
Textile Industry:
Used to dry yarns, fabrics, and fibers in a controlled environment, preserving texture and preventing shrinkage.
Mining & Minerals:
Efficiently dries sand, clay, ores, and other mineral-based materials before processing or packaging.
Chemical & Pharmaceutical Industries:
Suitable for drying powders, granules, and heat-sensitive compounds due to precise temperature control.
Food Processing:
Employed in drying herbs, spices, fruits, and vegetables where gentle heat preservation is critical.
Heating Method and Energy Efficiency of Vertical Wafer Dryer
Electric Heating:
Clean, precise, and easy to install; ideal for facilities with stable electricity supply. Offers excellent temperature control but may have higher running costs.
Gas Heating (Natural Gas or Propane):
Cost-effective for large-scale operations with access to gas lines. Requires proper ventilation and gas safety systems.
Steam Heating:
Common in industrial plants with existing steam infrastructure. Provides uniform heat distribution and is energy-efficient when integrated into larger systems.
Hot Air Recirculation (from Rotary Drum or External Source):
Reuses heated air to improve energy efficiency and reduce heat-up time. Ideal for continuous drying processes.
Saving technologies of Vertical Wafer Dryer
Automatic shut-off timers:
Prevent over-drying by stopping the cycle once the material reaches the desired moisture level.
Adjustable drying settings:
Allow users to customize temperature and airflow based on material type, optimizing energy use.
Heat recovery systems (in industrial models):
Recycle exhaust heat to preheat incoming air, significantly improving thermal efficiency.
Inverter-driven fans:
Adjust motor speed to match load requirements, reducing unnecessary power usage.
Safety Features of Vertical Wafer Dryer
Thermal Overheat Protection: Automatically shuts off the heater if temperatures exceed safe limits.
Emergency Stop Button: Instantly cuts power in case of malfunction or emergency.
Gas Leak Detectors (for gas models): Alert operators to potential leaks and can trigger automatic shutoff.
Door Interlock Systems: Prevent the machine from operating when the door is open, protecting users from burns or hot air exposure.
Ground Fault Circuit Interrupters (GFCI): Protect against electrical hazards, especially in damp environments.
Maintenance
Regular cleaning of lint traps and filters:
Prevents airflow blockages and reduces fire hazards caused by combustible dust accumulation.
01
Inspection and removal of debris:
Especially important when drying agricultural or industrial materials that may leave residue inside the drying chamber.
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Periodic lubrication of motors and bearings:
Recommended every 3–6 months depending on usage intensity to maintain smooth operation.
03
Checking seals and insulation:
Ensures heat retention and prevents energy loss in high-efficiency models.
04
Verifying sensor accuracy:
In automated systems, moisture and temperature sensors should be calibrated annually to maintain drying precision.
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FAQ
As one of the most professional spin rinse dryer manufacturers and suppliers in China, we're featured by quality products and good price. Please rest assured to buy customized spin rinse dryer from our factory. For quotation and pricelist, contact us now.
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