Product overview

The Desktop RTP Equipment Adaptable to small-sized wafers, the equipment features a compact design and flexible placement. Temperature control covers room temperature to 800℃ (thermocouple) and 500℃ to 1200℃ (infrared pyrometer), with a maximum heating rate of 150℃/s (wafer only). Temperature uniformity is ≤±3℃ (≤600℃) / ≤±0.5% (＞600℃), and reproducibility is ±1℃, ensuring precise temperature control. It employs manual loading/unloading and door opening/closing modes, is equipped with a buzzer and warning lights, and supports PC control. Desktop RTP Equipment can meet the basic rapid thermal processing requirements such as ion implantation annealing and oxide growth in laboratory R&D and small-batch production scenarios.

Advantages

Highly adaptable to space: Compact design allows for flexible placement, requiring minimal space and suitable for laboratories or small-batch production environments with limited space.

Precise and stable temperature control: Temperature uniformity reaches ≤±3℃ (≤600℃) / ≤±0.5% (＞600℃), meeting the temperature accuracy requirements of basic processes.

Safe and intuitive operation: Equipped with a buzzer and warning lights, it promptly indicates equipment status, reducing operational risks. PC control is supported, and parameter adjustment is convenient.

Good adaptability to basic processes: Supports a minimum pressure of 30mTorr and oxygen content of <3ppm. With 4-channel maximum MFC, it meets basic vacuum and atmosphere requirements, adapting to various simple and rapid heat treatment scenarios.

Applications

Ion Implantation Annealing

Simple Oxide/Nitride Growth

Silicide Alloy Pretreatment

Preliminary Ohmic Contact Alloying

Other Small Sample Heat Treatment

Parameters

Model	RTP-100
Wafer Size	6 inch and below
Size	910mm×860mm×695mm(W×D×H)
Temperature Range	R.T.~~800℃(Controlled by thermocople) 500℃~1200℃(Controlled by pyrometer)
Max Heating Rate	150℃/s---Wafer only 20℃/s---SiC carrier 30℃/s---Graphite carrier coating SiC
Temperature uniformity	≤±3℃ @ ≤600℃ ≤±0.5% @ ＞600℃
Temperature Repeatability	±1℃
Number of Lamps/SCRs	29 ea / 10 set
Max MFC	4
Lowest Pressure	30mTorr
Leak Rate	10mTorr/min
O₂ Percentage	＜3 ppm
Max/ Avg Power	60/ 36 Kw
Voltage	380V/ 60HZ/ 3 Phase 5 Wires
Control Method	PC Control

FAQ

The buzzer sounds and the warning light illuminates after startup?

First, press "RESET" to stop the alarm. Check if the cavity door is tightly closed and the door lock is secure. If the problem persists, check the door lock sensor wiring.

What precautions should be taken when manually loading and unloading wafers?

Wear clean gloves to prevent contamination. Handle the wafer gently to avoid collisions and ensure it is centered on the carrier.

How do I switch between thermocouple/infrared pyrometer temperature control?

Switch the "Temperature Control Mode" in the PC software: Use thermocouple for ≤800℃, manually switch to infrared for >800℃. The system will automatically calibrate after switching.

Heating rate is not 150℃/s (wafer only)?

Confirm there is no carrier (SiC/graphite carriers will limit the rate); check if all lamps are functioning properly. Faulty components require after-sales service.

Temperature uniformity exceeds ±3℃ (≤600℃)?

Confirm wafer ≤ 6 inches; check lamp power in software, if abnormal, engineer guidance for fine-tuning; regularly clean the quartz chamber and then calibrate.

Wafer surface oxidation?

Check if vacuum is ≤ 30 mTorr (if insufficient, check for leaks and replace vacuum pump oil); confirm O₂ content < 3 ppm (if exceeding, replace gas cylinder/check for pipeline leaks).

Key points of daily maintenance?

Wipe the quartz chamber with alcohol weekly, check the lamp assembly every 3 months (replace after 1000 hours), check the sealing ring for aging monthly, ensure water cooling does not exceed 70℃.

The Desktop RTP Equipment low pressure alarm?

A: Shut down the process, check the vacuum pipeline, restart the pump; if still abnormal, check the leakage rate (if exceeding 10 mTorr/min, locate and repair the leak).

PC cannot read parameters?

Check the communication cable between the equipment and the PC, restart and try again; if still no data, check the sensor wiring, or contact after-sales to check the software driver.

How to stop the equipment in an emergency?

Press "EMO Emergency Stop" to cut off the heat source and open the cover; after the fault is resolved, press "RESET" to reset and restart.