Product overview
The Proton Exchange Furnace is a high-precision thermal processing device - it's tailored specifically for manufacturing high-speed photonic devices. Built on a dual temperature zone synergistic control mechanism, it precisely drives proton exchange reactions in optical materials like lithium niobate. Yep, this efficiently forms low-loss integrated optical waveguide structures, laying a solid foundation for both R&D and mass production of high-performance photonic devices.
It features a compact vertical dual-tube design, which lets two process tubes run in parallel while saving installation space - a big boost to processing efficiency. On top of that, it's packed with an intelligent automated process management system that accurately controls key parameters like temperature and process time. That means it fully meets the strict environmental demands of proton exchange processes. Whether you're doing small-batch R&D in universities or research institutes, or large-scale production in enterprises, it delivers stable, reliable process support. This effectively optimizes optical material performance, while ramping up the reliability and yield of photonic devices.
Applications
Lithium niobate proton exchange for low-loss waveguides - mass-produces PICs/modulators/switches (5G/6G, high-speed data centers).
Processes lithium niobate splitters/couplers - low insertion loss, stable for FTTH/long-haul communication.
Flexible for universities/institutes: proton exchange research (e.g., lithium tantalate), quantum photonic device development.
Supports waveguide sensors/laser shapers - boosts precision in industrial laser processing/microelectronic packaging.
Advantages
- Efficient & Space-Saving Dual-tube vertical setup - saves space, runs in parallel, cranks up batch efficiency!
- High-Precision Temperature Control Made for lithium niobate: precise heat treatment, steady proton exchange, way fewer defects.
- Intelligent Process Management Smart system automates temp/duration params - super easy to use, meets strict process needs.
- Strong Scenario Compatibility Works for uni/institute research and industrial production alike - skips equipment replacement costs.
Parameters
|
Item |
Details |
|
Wafer Size |
2-4 inch |
|
Temperature Range |
200℃-300℃ |
|
Temperature Control Accuracy |
≤±0.5℃ |
|
Length of Constant Temperature Zone(Flat Zone) |
300 mm |
|
Applicable Process |
Lithium niobate proton exchange process |
|
Equipment Structure |
Double-tube vertical compact structure(supports parallel |
FAQ
What is the applicable wafer size range of this Proton Exchange Furnace?
It supports 2-4 inch wafers - perfect for lithium niobate photonic device processing, whether it's lab research or small-to-medium batch production.
What temperature parameters does the equipment cover, and how accurate is the temperature control?
Temp range is 200°C-300°C, control accuracy ≤±0.5℃. This high precision keeps proton exchange stable, so lithium niobate waveguide performance stays consistent.
Is the equipment only suitable for lithium niobate? Can it be adapted to other optical materials?
Its core use is lithium niobate proton exchange, but for other materials (like lithium tantalate), we can discuss customization based on your research or production needs - to match their unique proton exchange requirements.
What advantages does the "double-tube vertical compact structure" bring to actual use?
This structure saves installation space and lets two process tubes run in parallel - cranks up processing efficiency! Ideal for batch treatments, like enterprise mass production or high-frequency lab experiments.
What is the length of the constant temperature zone, and how does it affect the process?
The constant temperature (flat) zone is 300 mm. It keeps wafer heat distribution uniform, avoiding uneven proton exchange from temp differences - so integrated optical waveguide quality is guaranteed.
Can the equipment be integrated into existing intelligent production lines or experimental platforms?
Yep! It has an automated process management system that's compatible with most existing intelligent lines/platforms - seamless connection for parameter monitoring and process control.
Hot Tags: proton exchange furnace, China proton exchange furnace manufacturers, suppliers, Semi Automatic Rapid Thermal Processing Equipment, High Temp RTP Oxidation System, Fully Automatic RTP Furnace, Low Temperature RTP Furnace, Low Temperature RTP System, RTP Oxidation Diffusion Furnace
