Product overview
Nice-tech's Electron Beam Evaporator are a series of high-performance PVD (Physical Vapor Deposition) equipment developed for diverse industrial production and scientific research needs. Covering wafer-level mass production, large-size workpiece coating, small-batch R&D, and specialized process scenarios, the product line includes multiple models such as EBE 700, EBE 600 / EBE 600P, EBE 500, EBE 400, EBE300 / EBE300P, EBE 200 /EBE 200P, EBE 100. Each system integrates advanced vacuum coating technology and world-class core components (from brands like Edwards, Pfeiffer, and MKS), paired with the self-developed VKOS fully automatic control system, ensuring stable, reliable, and efficient film deposition.
The product series features flexible structural designs-including single-chamber, dual-chamber, and compact configurations-to adapt to different space and process requirements. Key performance indicators stand out: coating uniformity as precise as ±2% (most models) and ±3% (compact models), ultimate vacuum reaching 1E-5Pa to 2E-5Pa, and temperature control ranges spanning from -50℃ to 500℃ (or RT to 500℃) to meet the deposition needs of various materials. Whether it's wafer-level mass production, complex multi-layer film preparation, or laboratory R&D verification, Vikaitech's electron beam evaporation systems deliver tailored solutions.
Advantages
- Superior Film Quality & High Consistency
- Diversified Models for Targeted Needs
- High Automation & Easy Maintenance
- Strong Compatibility & Customization
- Reliable Core Configurations
Applications
- Semiconductor & Microelectronics
- Optoelectronics & Optical Communication
- Aerospace & Infrared Detection
- Biomedicine & New Materials
- Industrial Mass Production
- Scientific Research & Universities
Parameters
|
Item |
EBE 700 (High-End Mass Production Type) |
EBE 600/ EBE 600P (Production Dual-Chamber Type) |
EBE 500 (Universal Dual-Chamber Type) |
EBE 400 (R&D Dual-Chamber Type) |
EBE300 /EBE 300P (Production Single-Chamber Type) |
EBE 200 /EBE 200P (Universal Single-Chamber Type) |
EBE 100 (Compact Type) |
|
Coating Uniformity |
±2% |
±3% |
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|
Coating Repeatability |
±2% |
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|
Ultimate Vacuum |
2E-5Pa |
1E-5Pa |
1E-5Pa |
1E-5Pa |
2E-5Pa |
1E-5Pa |
1E-5Pa |
|
Temperature Control Range |
RT ~ 200℃ |
RT ~ 300℃ |
RT ~ 500℃ |
RT ~ 500℃ |
RT ~ 300℃ |
RT ~ 500℃ |
-50℃ ~ 500℃ |
|
Uniform Deposition Area |
Wafer-Level (8-inch & Above for Mass Production) |
Large-Size Workpieces (≤1000mm × 1000mm) |
Universal Size (Suitable for Production & R&D) |
Small-to-Medium Batch Workpieces (R&D & Small-Scale Production) |
Large-Size Workpieces (≤1000mm ×1000mm) |
Maximum Ø300mm (Wafer/Workpiece) |
Laboratory-Scale Small Size (≤Ø150mm ) |
|
Chamber Type |
Single Chamber (Wafer-Level Fully Automatic) |
Dual Chamber (Production Type, Independent Process Chamber) |
Dual Chamber (Universal Type, Mutual Load Lock) |
Dual Chamber (R&D Type, Upper-Lower Chamber Load Lock) |
Single Chamber (Production Type, Large Chamber) |
Single Chamber (Universal Type, Standard Chamber) |
Single Chamber (Compact Type, Small Chamber) |
|
Loading System |
Automatic Wafer Transfer |
Automatic Robot Transfer |
Single/Multi-Wafer Automatic Load Lock |
Single/Multi-Wafer Automatic Load Lock |
Automatic Robot Transfer |
Manual/Semi-Automatic Loading |
Manual Loading (Portable) |
|
L×W×H(m) |
8.5×5.5×3.3 |
4.4×4.1×2.6 |
4.0×3.1×2.9 |
3.0×2.5×2.2 |
4.05×3.9×2.8 |
3.35×2.8×2.2 |
3.15×2.4×2.2 |
|
Net Weight (Approx.) |
12000kg |
8500kg |
6800kg |
4200kg |
7200kg |
5500kg |
3800kg |
FAQ
Q: What's the core application?
A: High-precision thin-film deposition for semiconductor, optoelectronics, aerospace, biomedicine, and new material R&D.
Q: What materials are compatible?
A: Metals (Al, Au), dielectrics (SiO₂), semiconductors, compounds, ceramics; T360 optimized for indium deposition.
Q: Key performance specs?
A: Coating uniformity ±2% (production models)/±3% (R&D/compact); repeatability ±2%; ultimate vacuum 1E-5Pa~2E-5Pa.
Q: Can configurations be upgraded?
A: Yes-add ion sources, pre-vacuum chambers, fixtures, or automatic loadlocks (model-dependent).
Q: Installation & training included?
A: On-site installation/commissioning + operation/maintenance training; remote guidance available.
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