We have developed new RTP Equipment, Thermal Processing Tube Furnace, Fully Automatic RTP Furnace that meet the requirements of our customers, create benefits for the enterprise and reduce environmental pollution.The company has outstanding performance in technology and has made great contributions to the development of China's RTP Oxidation and Diffusion System industry.We believe in empowering our employees to take ownership and pride in their work, fostering a culture of innovation and excellence. The pursuit of customer loyalty and long-term customer satisfaction is the foundation of our company's activities. Through continuous institutional innovation, technological innovation, and management innovation, with an international perspective, we wholeheartedly provide our customers with high-quality and diversified household products and services, leading a comfortable, environmentally friendly and healthy household lifestyle. Our products are designed to improve efficiency and productivity in a variety of different industries. Our long-term goal is to achieve the harmony and unity of economic, social and environmental benefits.
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Oxidation and Diffusion RTP EquipmentThe Oxidation and Diffusion RTP Equipment stands as a core thermal tool for semiconductors, packing oxidation, diffusion, and annealing capabilities into a single unit. It’s designed specifically...read more
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Mercury Annealing FurnaceThis Ion Beam Deposition Equipment is a high-precision thin film deposition system designed for the preparation of metal wire and ohmic contact thin films in infrared device manufacturing.read more
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SiC High Temperature Oxidation FurnaceThis SiC high-temperature oxidation furnace is a specialized thermal processing device built for silicon carbide semiconductor manufacturing. It’s mainly used to grow high-quality gate oxide...read more
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SiC Epitaxy FurnaceOur SiC epitaxy furnace is a specialized piece of equipment built for the homoepitaxial growth of 4H-SiC, a core material in third-generation semiconductors.read more
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Vertical Thermal Processing FurnaceOur Metal-Organic Chemical Vapor Deposition (MOCVD) equipment is a core manufacturing tool dedicated to the deposition of high-quality epitaxial materials. It is professionally designed for the...read more
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Vertical Oxidation And Annealing FurnaceOur vertical oxidation and annealing furnace is built for reliable thermal processing in semiconductor production. It handles oxidation, annealing, and alloying for wafers used in integrated...read more
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High-Temperature Oxidation RTP EquipmentOur company's High-Temperature Oxidation RTP Equipment is a core thermal equipment in large-scale semiconductor production. It is specifically designed to create clean, dense SiO₂ films on silicon...read more
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Low-Temperature RTP EquipmentLow-Temperature RTP Equipment: It offers exceptionally precise temperature control from 250℃ to 500℃, handling heat treatment of materials such as lithium niobate and silicon effectively.read more
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Automatic RTP EquipmentThe Automatic RTP Equipment compatible with 8-12 inch wafers, featuring single/dual-cavity designs, and specifically designed for mass production. Integrating robots and other components, it...read more
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Desktop RTP EquipmentThe Desktop RTP Equipment Adaptable to small-sized wafers, the equipment features a compact design and flexible placement. Temperature control covers room temperature to 800℃ (thermocouple) and...read more
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Wet Oxidation FurnaceThis is a core process tool tailored specifically for making Wet Oxidation Furnace (Vertical-Cavity Surface-Emitting Laser (VCSEL) devices). It’s built to handle both optoelectronic and...read more
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Proton Exchange FurnaceThe Proton Exchange Furnace is a high-precision thermal processing device — it’s tailored specifically for manufacturing high-speed photonic devices. Built on a dual temperature zone synergistic...read more
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We rely on integrated large-scale manufacturing capabilities and advanced management concepts to provide customers with high quality Semi Automatic RTA System, Low Temperature RTP System . As one of the most professional rtp oxidation and diffusion system manufacturers and suppliers in China, we're featured by quality products and good price. Please rest assured to buy customized rtp oxidation and diffusion system from our factory. For quotation and pricelist, contact us now.
