Our High-Temperature Oxidation RTP Equipment is a core thermal tool for large-scale semiconductor production-its main job is to create clean, dense SiO₂ films on silicon substrates, perfect for making CMOS, IGBT, and MEMS devices. It's widely used across semiconductor manufacturing, new energy electronics, high-end electronic components, and even university/research lab settings for semiconductor R&D and pilot production.
How to Choose the Right Model
Picking the right one boils down to your production needs and processes-here's a straightforward breakdown:
1. 12-inch Model
If you're into advanced mass production of large-size wafers, this is the one. It can handle ≥125 wafers per boat, so it's great for high-volume, large-scale manufacturing of core semiconductor devices. Plus, it offers precise temperature control (±0.5℃) and a constant temperature zone of ≥850mm, ensuring consistent film thickness (WIW/WTW/RTR ≤ ±2%) for every batch.
2. 8-inch Model
This one's all about flexibility. It works with multiple oxidation methods-dry oxygen (Si) and wet oxygen (rapid evaporation/water bath/HO ignition)-so it fits most mainstream mass production needs. Temperature-wise, it ranges from 600-1150℃ with ≤±0.5℃ control accuracy, and its constant temperature zone (300-860mm) delivers reliable film uniformity (WIW/WTW ≤ ±2%). It's tailored for 8-inch mass production, so efficiency stays on par with large-scale demands.
Who It's For & Where It Fits
Large semiconductor manufacturers: The 12-inch model is your go-to for cranking out CMOS chips, IGBT power devices, and other core components in high volumes.
Mainstream electronics/new energy firms: The 8-inch model shines here-whether you're making automotive electronics, 5G communication core parts, consumer electronic chips, or power semiconductors, its multi-process compatibility keeps production smooth.
Universities & research institutions: The 8-inch model is perfect for testing new semiconductor materials or developing cutting-edge device prototypes. It adapts easily to different R&D setups, which is a big plus for lab work.
A quick note on quality: We use professional materials and smart structural design for the chamber, so film purity is guaranteed-no unwanted impurities messing things up. And both models excel at stable processes, thanks to precise temperature control and consistent film quality.
Still not sure which fits best? Reach out to us, and we'll help you nail down the right equipment for your workflow!
