Tired of bulky equipment taking over your lab or small production space? The RTP-100 desktop RTP system is built for small wafers (6 inches max)-perfect for teams that need precision without sacrificing square footage. It's straightforward, reliable, and tailored to the everyday needs of researchers and small-batch manufacturers.
What We Love About It
Fits like a glove: At 910 mm×860 mm×695 mm (W×D×H), it slips into tight corners or crowded workbenches. No need to rearrange your entire setup just to add thermal processing capability.
Temperature control you can count on: Two ways to regulate heat-thermocouple for room temp up to 800℃ and infrared pyrometer for 500℃ to 1200℃. Heats wafers up to 150℃/s (way faster than with SiC or graphite carriers, which cap at 20-30℃/s). And the consistency? ≤±3℃ uniform below 600℃, ≤±0.5% above that, plus ±1℃ repeatability-so your results won't vary batch to batch.
No-fuss operation: Manual loading/unloading keeps things simple (great if you prefer hands-on control), while a buzzer and warning lights let you know if something's off. PC control makes tweaking parameters easy, too-no complicated training required.
Covers the basics (and then some): Handles vacuum down to 30 mTorr, keeps oxygen under 3ppm, and supports up to 4 MFC channels. Whether you're doing ion implantation annealing, oxide growth, or small sample heat treatments, it checks all the boxes for basic rapid thermal processing.
Who It's For
This isn't for large-scale factories-this is for the lab tech running daily experiments, the small manufacturer churning out custom components, or the research team testing new materials. If you work with small wafers and need consistent results without the hassle of industrial-sized gear, this one's for you.
Quick Tips for Using It Right
Switching temperature modes: Use the thermocouple for temps up to 800℃, and flip to infrared in the PC software for anything hotter. The system calibrates itself automatically-nice touch.
Loading wafers: Don't skip the clean gloves! Fingerprints or dust ruin results. Handle gently, no dropping, and make sure it's centered on the carrier-simple steps that save headaches later.
Common fixes: If the buzzer goes off on startup, first check if the cavity door is locked tight (we've all forgotten that!). If heating rate isn't hitting 150℃/s, make sure you're not using a carrier-those slow it down. And if your wafers are oxidizing unexpectedly, double-check the vacuum (should be ≤30 mTorr) and oxygen levels (keep it <3 ppm).
Maintenance that matters: Wipe the quartz chamber with alcohol weekly-grime builds up faster than you think. Check the lamps every 3 months (replace after 1000 hours) and the sealing rings monthly for cracks. Oh, and don't let the water cooling go over 70℃-that's a quick way to damage parts.
A Solid Workhorse
Certified to SEMI S2 standards, this thing's built to last. It doesn't have flashy extra features you'll never use, but it nails the essentials: precision, compactness, and ease of use. For labs and small teams that need a thermal processing solution that works, day in and day out, the RTP-100 is a no-brainer. It's not perfect (nothing is!), but it's reliable-and that's what counts when you're trying to keep experiments or production on track.
