The three-dimensional optical profilometer achieves micrometer to nanometer level precision measurement through white light interference or confocal technology, and analyzes the three-dimensional morphology, roughness, and contour of solid material surfaces. This instrument has non-contact measurement characteristics, avoiding damage to the measured surface, and is suitable for diverse materials such as transparent/metal/high reflection. In the fields of mechanical manufacturing, semiconductors, aerospace, etc., 3D optical profilometers are widely used in quality control, process monitoring, and product development.
By 2025, mainstream models such as ZeGage Pro and SuperViewW1 will have both seismic performance and automated measurement capabilities, with measurement accuracy exceeding 0.1nm level. The instrument's functions include micro morphology analysis, curvature calculation, and thin film characteristic detection, which comply with the ISO 25178 standard and have become the core detection equipment for modern precision manufacturing
