Technical Principle
The 3D optical profilometer mainly adopts two optical technologies:
1. White light interference technology: By analyzing the phase changes of interference fringes and calculating the surface height difference, it has sub nanometer longitudinal resolution.
2. Confocal technology: utilizing the principle of conjugate focus of the objective lens, the focusing accuracy reaches 2nm, suitable for measuring high slope surfaces.
Application Field
1. Precision Manufacturing: Failure Analysis of Semiconductor Chips, Characterization of MEMS Devices.
2. Materials research: Corrosion detection of metals/plastics, measurement of optical film reflectivity.
3. Industrial testing: Wear analysis of automotive components, flatness evaluation of aerospace components.
