• Wet Oxidation Furnace
    This is a core process tool tailored specifically for making Wet Oxidation Furnace (Vertical-Cavity Surface-Emitting Laser (VCSEL) devices). It’s built to handle both optoelectronic and semiconductor device process needs—using...
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  • Tube Thermal Furnace
    Vertical Tube Furnace saves space, fits ≤8-inch wafers (12-inch industrial option available). Key specs: 850mm max constant temperature zone, ±0.5℃ control accuracy.
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  • Proton Exchange Furnace
    The Proton Exchange Furnace is a high-precision thermal processing device — it’s tailored specifically for manufacturing high-speed photonic devices. Built on a dual temperature zone synergistic control mechanism, it precisely drives...
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Low Temperature RTP Furnace, Thermal Processing Tube Furnace, Wet Oxidation System
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